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  • 產品名稱：美國精量電子MEAS超聲波液位計SL-700

  • 產品型號：SL-700
  • 產品廠商：MEAS精量電子
  • 產品文檔：
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美國精量電子MEAS超聲波液位計SL-700,The Model SL-700 Series Ultrasonic Micromeasurement System is an ideal solution for the detection and measurement of ultra pure chemical fluids in the semiconductor
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DESCRIPTION

The Model SL-700 Series Ultrasonic Micromeasurement System is an ideal solution for the detection and measurement of ultra pure chemical fluids in the semiconductor industries using very small sensor (VSS) technology. Measuring a fluid level accurately and reliably in the chemical vapor deposition process is of the utmost importance to the semiconductor wafer fabrication process. The Measurement Specialties SL-700 Series provides a continuous transmitter with a very high degree of precision. The SL-700 Series ultrasonic system is well suited for high viscosity liquids such as DMAH, titanium precursors and copper precursors.

 


FEATURES                                                             APPLICATIONS 

?    316 LSS machine body sensor

?    Semiconductor industries

?    Sensor material finish 10μin RA electropolished

 

?      Miniature sensor size reduces liquid volume displacement

?      Works with the following chemicals independent

 

of dielectric, viscosity, color, density and opacity of chemical fluids: DMAH, TAETO, CVD, TDEAT, CUTMUS, TEOS, DCE, TCA

?    High pressure vessel application up to 250

 

PSIG (1724 Kpa) (consult factory for higher pressure applications)

 

?      Accuracy of continuous level transmitter ±0.01 in (0.25 mm) or better

?      Continuous transmitter output, 4-20 mA, 1-10 V,

 

RS-232, remote unit with digital display, two alarm

 

       

 美國精量電子MEAS超聲波液位計SL-700

Parameter

Typical Value

Repeatability

±0.005 in (0.127 mm) typical

Input Power

VDC, 115 VAC/230VAC, 50/60

Hz (optional) 

Output

Continuous 4-20 mA. 0-5 V or 0-10 V, RS 232 PC compatible, bidirectional communication, two alarm

Housing

NEMA 1; NEMA-4X (stainless steel) optional

Range

to 10 in (25.4 to 254 mm) (consult factory for longer range

Parameter

Typical Value

Mounting

?’ M VCR, ?” F VCR

Sensor Material

LSS (standard)

Operating Pressure

Up to 250 PSIG (1724 Kpa)

Temperature

Sensor: -20 to 200 °F (-29 to 93 °C)

Electronics: -20 to 170 °F (-29 to 77 °C)

 

MECHANICAL DIMENSIONS

in inches [mm]

 

PERFORMANCE SPECIFICATIONS

美國精量電子MEAS超聲波液位計SL-700 

Figure 1: SL-700 series elements electronic module

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